Credits: 5

Schedule: 08.01.2020 - 19.02.2020

Contact information for the course (applies in this implementation): 

Questions should be preferably asked in the MyCourses Discussion Forum.
Teachers are available for questions during the lectures and exercise
sessions. Please contact the course staff via email
( only in personal questions (e.g. regarding

Teaching Period (valid 01.08.2018-31.07.2020): 

III (spring)

Learning Outcomes (valid 01.08.2018-31.07.2020): 

At the completion of the course, the student will be able to

  • explain the physics behind MOS structures and apply this information in devices (MOSFET)
  • explain the most common semiconductor fabrication technologies and apply them in device fabrication
  • name the most common crystalline silicon solar cell types and explain their operation principle
  • explain the fundamental physical phenomena behind novel silicon photosensors

Content (valid 01.08.2018-31.07.2020): 

  • Silicon solar cells
  • Silicon photosensors
  • Semiconductor device fabrication (basics, background for Microfabrication course)

Assessment Methods and Criteria (valid 01.08.2018-31.07.2020): 

  • lectures
  • home and lecture exercises
  • student presentation
  • exam

Elaboration of the evaluation criteria and methods, and acquainting students with the evaluation (applies in this implementation): 


The final course grade will be based on the following four parts:

  • pre-lecture exercises (during the course, 8 lectures)
  • home exercises (during the course, three sets of calculation exercises + one small group work prepared during a lecture)
  • online calculation exercises (at the end of the course)
  • individual presentation / "mini-exam" (at the end of the course)

Please see more information on grading from the "Grading" section.

Points earned from the pre-lecture exercises are available immediately after submitting the answers and those earnerd from the home exercises will be published in MyCourses soon
after the deadline. Point limits for each grade will be announced in the
end of the course.


  • Written final exam: 100% of the grade will be based on the exam

Workload (valid 01.08.2018-31.07.2020): 

28+14 (4+2)

Details on calculating the workload (applies in this implementation): 

- lectures: contact sessions 20 h

- pre-lecture exercises and familiarization with material before lectures: 12 h

- exercises solved during the course: sessions 6 h + independent working 12 h

- online exercise set (including preparation): 20 h

- individual presentation / "mini-exam": presentation session 1 h + preparation 15 h

- independent working on course material: 50 h

Study Material (valid 01.08.2018-31.07.2020): 

  • C. Hu: Modern semiconductor devices for integrated circuits (chapters 3, 5, 6)
  • Scientific articles
  • Handouts

Details on the course materials (applies in this implementation): 

All course material, including the book, is available in MyCourses free
of charge. All distributed book chapters and handouts are included in
the examination material.

Substitutes for Courses (valid 01.08.2018-31.07.2020): 

S-69.2111 Mikro- ja nanoelektroniikan perusteet

S-69.3114 Microsensors

Prerequisites (valid 01.08.2018-31.07.2020): 

ELEC-E3140 Semiconductor Physics

Grading Scale (valid 01.08.2018-31.07.2020): 


Registration for Courses (valid 01.08.2018-31.07.2020): 


Further Information (valid 01.08.2018-31.07.2020): 

language class 3: English

Details on the schedule (applies in this implementation): 

Lectures are held on Mondays 12-14 and Wednesdays 12-14 in Iso-sali (Micronova, Tietotie 3), and exercise session on Wednesdays 14-16.

See a more detailed schedule from the Course home page.


Registration and further information