Please note! Course description is confirmed for two academic years, which means that in general, e.g. Learning outcomes, assessment methods and key content stays unchanged. However, via course syllabus, it is possible to specify or change the course execution in each realization of the course, such as how the contact sessions are organized, assessment methods weighted or materials used.


At the completion of the course, the student will be able to

  • understand the significance and the perspective of the semiconductor device industry
  • explain the most common silicon fabrication technologies and apply them in device fabrication
  • explain the relevant physics behind the three building blocks of the semiconductor devices
  • apply the building blocks at the device level
    • explain the physics behind the pn-junction and apply this information in devices
    • explain the physics behind MOS structures and apply this information in devices

Credits: 5

Schedule: 10.01.2022 - 23.02.2022

Teacher in charge (valid for whole curriculum period):

Teacher in charge (applies in this implementation): Hele Savin, Ville Vähänissi

Contact information for the course (applies in this implementation):

Questions should be preferably asked in the MyCourses Discussion Forum. Teachers are available for questions during the lectures and exercise sessions. Please contact the course staff via email ( only in personal questions (e.g. regarding grading).

Course assistants in 2022:

  • Dr. Hussein Ayedh (Exercises)
  • MSc. Hanchen Liu (Grading)
  • MSc. Olli Setälä (MyCo pages)

CEFR level (valid for whole curriculum period):

Language of instruction and studies (applies in this implementation):

Teaching language: English. Languages of study attainment: English


  • valid for whole curriculum period:

    This course provides the student essential background on semiconductor devices based on silicon technology. The course starts by covering three basic building blocks of the semiconductor devices: metal- semiconductor interface, pn-junction and metal-oxide-semiconductor structure. These building blocks are then extended to selected major silicon devices, such as, solar cells, detectors and field effect transistors. The course provides suitable background required both in semiconductor industry and in related academic research.

  • applies in this implementation

    In 2022 course we have also two invited lectures from semiconductor industry (live sessions):

    - Dr. Guillaume von Gastrow / Sunpower Inc. (solar cells)

    - Dr. Mikko Juntunen / ElFys Inc. (radiation detectors)

Assessment Methods and Criteria
  • valid for whole curriculum period:

    The students will be assessed based on the combination of following sub-tasks

    • pre-lecture exercises
    • calculation exercises
    • lecture exercises
    • individual mini-exam 

    Alternnatively the student can choose the traditional "exam only" assesment method.

  • applies in this implementation


    The final course grade will be based on the following five tasks:

    1) pre-lecture exercises (before each lecture, 9 exercises), weight 15%

    2) post-lecture exercises (after each lecture, 9 exercises), weight 15%

    3) calculation exercises (during the course, four sets of calculation exercises + one small group work prepared during final lecture), weight 20%

    4) online exam (can be taken anytime), weight 15%

    5) individual discussion (at the end of the course), weight 35%

    There are minimum points needed for each section to pass the course (3-5%). Please see more information on grading from the "Grading" section as well as from the 1st lecture slides (course practicalities.pdf).

    Points earned from the pre- and post-lecture exercises are available immediately after submitting the answers in MyCourses. The correct answers are discussed in the following live-discussion events. The points earned from the calculation exercises will be published in MyCourses soon after each deadline. The course assistants will present the correct answers during the exercise sessions. The points for the online exam and individual discussion will be announced in the second last week of the course together with the point limits for final grades. 


    - Final exam: 100% of the grade will be based on the exam

    In case you are interested in this option, please contact the teachers 1-2 weeks before the exam to get more instructions.

  • valid for whole curriculum period:

    28+14 (4+2)

  • applies in this implementation

    - lecture recordings: 12 h

    - discussion sessions: 12 h

    - pre-lecture exercises and familiarization with material before lectures: 18 h

    - post-lecture exercises and familiarization with material before lectures: 18 h

    - calculation exercises: contact sessions 8 h + group exercise 4h + independent working 8 h

    - online exam (including preparation): 8 h

    - individual discussion: live session 15 min + preparation 10 h 

    - overall thinking and reflecting: 36 h


Study Material
  • valid for whole curriculum period:

    • Chenming Calvin Hu "Modern Semiconductor Devices for Integrated Circuits", Pearson Education (2010) - chapters 3-6 (

    • - chapters 1, 3-6, 8

    • Simon Sze Semiconductor Devices Physics and Technology, 3rd ed, Wiley 2013 chapter 10.1.

    • Lecture slides

  • applies in this implementation

    All course material, including the course book, is available in MyCourses free of charge.

Substitutes for Courses
SDG: Sustainable Development Goals

    4 Quality Education

    7 Affordable and Clean Energy

    9 Industry, Innovation and Infrastructure

    13 Climate Action


Further Information
  • valid for whole curriculum period:

    Teaching Period:

    2020-2021 Spring III

    2021-2022 Spring III

    Course Homepage:

    Registration for Courses: In the academic year 2021-2022, registration for courses will take place on Sisu ( instead of WebOodi.


Details on the schedule
  • applies in this implementation

    The first lecture is LIVE event on Monday 10.1.2022 at 12:15-14:00 in Small lecture hall in Micronova, Tietotie 3 (no recording available for this lecture).

    For all other lectures, separate recordings are available for the whole duration of the course and can be watched any time. There are specific deadlines for (pre/post)lecture and calculation exercises (see the corresponding MyCo pages or the link "Course practicalities" on the course front page).

    The live discussion events related to the lectures and lecture exercises are held on Mondays 13-14 and Wednesdays 13-14.  Location of these is to be agreed together with the students during the first lecture. The exercise session with course assistant presence is held on Wednesdays 14-16 (Small lecture hall in Micronova).

    See a more detailed schedule from the Course home page.