Please note! Course description is confirmed for two academic years, which means that in general, e.g. Learning outcomes, assessment methods and key content stays unchanged. However, via course syllabus, it is possible to specify or change the course execution in each realization of the course, such as how the contact sessions are organized, assessment methods weighted or materials used.

LEARNING OUTCOMES

This course is about micro-electro-mechanical systems (MEMS), which are miniaturized devices in the micrometer scale combining mechanical (moving), optical, and fluidic elements with electronics. The course covers the main physical operation principals and applications of MEMS technology enabling today numerous functions in e.g. smart phones such as motion sensing, image stabilization, voice recognition, environmental monitoring and proximity sensing.
After the course the student will understand the operating principals of advanced MEMS, be able to design extremely miniaturized sensors and actuators and conduct quantitative performance analysis. The student will be familiar with the tools to characterize MEMS devices and identify and analyse key impact factors from manufacturing and design. The student will also gain insight into future sensor and actuator development needs on accuracy, security, new materials and integration for high performance applications such as autonomous driving, fifth generation (5G) mobile communication systems, internet of things (IoT), augmented reality (AR) and virtual reality (VR).

Credits: 5

Schedule: 04.09.2023 - 11.12.2023

Teacher in charge (valid for whole curriculum period):

Teacher in charge (applies in this implementation): Mervi Paulasto-Kröckel, Nikhilendu Tiwary

Contact information for the course (applies in this implementation):

CEFR level (valid for whole curriculum period):

Language of instruction and studies (applies in this implementation):

Teaching language: English. Languages of study attainment: English

CONTENT, ASSESSMENT AND WORKLOAD

Content
  • valid for whole curriculum period:

    Micro-electro-mechanical systems such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling.

  • applies in this implementation

    About the course: This course covers micro-electro-mechanical systems (MEMS) such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling using Comsol.

    Teachers: Experts from Aalto University, VTT, Murata Electronics and Vaisala

    Structure: Onsite lectures in R030/T6 A136, exercises

    Requirements and grading: 

    - Grading from 0 to 5

    - Exam 50% (max 150 points)

    - Exercises 50% (max 150 points)


Assessment Methods and Criteria
  • valid for whole curriculum period:

    Exam, homework, assignments

Workload
  • valid for whole curriculum period:

    Lectures and exercises: 60 h
    Homework and other independent work: 70 h

DETAILS

Substitutes for Courses
Prerequisites
SDG: Sustainable Development Goals

    3 Good Health and Well-being

    9 Industry, Innovation and Infrastructure

    11 Sustainable Cities and Communities

FURTHER INFORMATION

Further Information
  • valid for whole curriculum period:

    Teaching Language : English

    Teaching Period : 2022-2023 Autumn I - II
    2023-2024 Autumn I - II

    Enrollment :

    Registration for Courses on Sisu (sisu.aalto.fi).