Omfattning: 5

Tidtabel: 24.02.2016 - 31.03.2016

Ansvarslärare (är i kraft 01.08.2018-31.07.2020): 

Jari Koskinen

Undervisningsperiod (är i kraft 01.08.2018-31.07.2020): 

III

Lärandemål (är i kraft 01.08.2018-31.07.2020): 

After having passed this course the student knows the basic thin film processing methods by using vacuum technology, the basic thin films structure and property characterization methods. The student is familiar with the dependence of thin films structure and properties to the critical coating parameters. The student can select the most potential methods to produce thin films for wanted applications.

Innehåll (är i kraft 01.08.2018-31.07.2020): 

Principles of vacuum technology, surface physics and surface-ion interactions and low pressure plasma. Thin film methods: Physical vapor deposition, chemical vapor deposition, and other plasma. Characterization methods for thin films to determine, structure, composition, and mechanical and optical properties.

Metoder, arbetssätt och bedömningsgrunder (är i kraft 01.08.2018-31.07.2020): 

Lectures, active exercises and student presentations during contact sessions, examination.

Arbetsmängd (är i kraft 01.08.2018-31.07.2020): 

5 cr = 135 h 

Contact teaching 24 h 

Self-study for exercises 78 h 

Preparation of exam 30 h + 3 h

Studiematerial (är i kraft 01.08.2018-31.07.2020): 

Handouts, training material. Murarka, S.P.: Metallization, Theory and Practice for VLSI and ULSI, Butterworth-Heinemann, 1993. Mahan, J.E.: Physical Vapor Deposition of Thin Films, John Wiley & Sons, 2000. Smith, D.L.: Thin-film deposition: principles and practice, McGraw-Hill, 1995. J.L. Vossen & W. Kern (eds.): Thin Film Processes II, Academic Press, 1991. Ohring, M.: The Materials Science of Thin Films, Academic Press, 1992.

Ersättande prestationer (är i kraft 01.08.2018-31.07.2020): 

MT-0.6021 Fundamentals of Vacuum Technology, Thin Films and Metallurgical Coatings (3 cr), MT-0.6067 Thin Film Technology (5 cr)

Kursens webbplats (är i kraft 01.08.2018-31.07.2020): 

https://mycourses.aalto.fi/course/search.php?search=CHEM-E5125

Förkunskaper (är i kraft 01.08.2018-31.07.2020): 

Recommended CHEM-E5100 Solid State Materials and Phenomena and CHEM-E5140 Materials Characterization, laboratory course

Bedömningsskala (är i kraft 01.08.2018-31.07.2020): 

Fail, 1 - 5.

Anmälning (är i kraft 01.08.2018-31.07.2020): 

WebOodi

Students chosen to this course are primarily major students of Functional Materials. If more than 20 students enroll to this course, the number of course participants can be limited. All major students are, however, chosen to the course if enrolled in time.

Tilläggsinformation (är i kraft 01.08.2018-31.07.2020): 

Students chosen to this course are primarily major students of Functional Materials. If more than 20 students enroll to this course, the number of course participants can be limited. All major students are, however, chosen to the course if enrolled in time.

Beskrivning