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ELEC-E8715 - Design and Analysis of MEMS D, 07.09.2020-07.12.2020

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    • icon for activity Course Overview File PDF document

      About the course: This course covers micro-electro-mechanical systems (MEMS) such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling using Comsol.

      Teachers: Experts from Aalto University, VTT, Murata Electronics, Vaisala and Okmetic

      Structure: Remote lectures, exercises

      Requirements and grading: 

      - Grading from 0 to 5

      - Exam 40% (max 120 points)

      - Exercises 60% (max 180 points)



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  • ELEC-E8715 - Design and Analysis of MEMS D, 07.09.2020-07.12.2020
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  • Schools
    • School of Arts, Design, and Architecture (ARTS)
    • School of Business (BIZ)
    • School of Chemical Engineering (CHEM)
    • –sGuides for students (CHEM)
    • – Instructions for report writing (CHEM)
    • School of Electrical Engineering (ELEC)
    • School of Engineering (ENG)
    • School of Science (SCI)
    • Language Centre
    • Open University
    • Library
    • Aalto university pedagogical training program
    • UNI (exams)
    • Sandbox
  • CORONAVIRUS INFO
    • Koronavirus - tietoa opiskelijalle
    • Coronavirus - information for students
    • Coronavirus - information för studerande
    • Koronaviruksen vaikutus opiskeluun: kysymyksiä ja vastauksia
    • Effects of the coronavirus on studies: questions and answers
    • Coronaviruset och studierna: frågor och svar
    • Corona help for teachers
  • Service Links
    • MyCourses
    • - Instructions for Teachers
    • - Teacher book your online session with a specialist
    • - Digital tools for teaching
    • - Personal data protection instructions for teachers
    • - Instructions for Students
    • - Workspace for thesis supervision
    • WebOodi
    • Into portal for students
    • Courses.aalto.fi
    • Library Services
    • - Resourcesguides
    • - Imagoa / Open science and images
    • IT Services
    • Campus maps
    • - Search spaces and see opening hours
    • Restaurants in Otaniemi
    • ASU Aalto Student Union
    • Aalto Marketplace
  • ALLWELL?
    • Study Skills
    • Support for Studying
    • Starting Point of Wellbeing
    • About AllWell? study well-being questionnaire
  •   ‎(en)‎
    •   ‎(en)‎
    •   ‎(fi)‎
    •   ‎(sv)‎