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    • About the course: This course covers micro-electro-mechanical systems (MEMS) such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling using Comsol.

      Teachers: Experts from Aalto University, VTT, Murata Electronics and Vaisala

      Structure: Remote lectures, exercises

      Requirements and grading: 

      - Grading from 0 to 5

      - Exam 40% (max 120 points)

      - Exercises 60% (max 180 points)


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