CHEM-E5230001 - Advanced Micro- and Nanotechnology D, Lecture, 13.9.2021-16.12.2021

Topic outline

• Reading materials
  • Select activity Lecture 1: silicon crystal growth and wafering processes

    Not available unless: You are a(n) Student

    

    Lecture 1: silicon crystal growth and wafering processes File PPT
  • Select activity Lecture 2: epitaxy

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    Lecture 2: epitaxy File PPTX
  • Select activity Lecture 3 Polishing and bonding

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    Lecture 3 Polishing and bonding File PPTX