Credits: 5

Schedule: 26.02.2019 - 15.05.2019

Teacher in charge (valid 01.08.2018-31.07.2020): 

prof. Sami Franssila

Other teachers:

Dr. Victor Ovchinnikov

Teaching Period (valid 01.08.2018-31.07.2020): 

IV-V

Learning Outcomes (valid 01.08.2018-31.07.2020): 

The student is able to design fabrication processes for simple silicon microdevices, and able to analyze fabrication processes of complex silicon microdevices.

Content (valid 01.08.2018-31.07.2020): 

Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS and MEMS devices. Cleanrooms, process equipment, yield and reliability. Lab demo.

Assessment Methods and Criteria (valid 01.08.2018-31.07.2020): 

Exercises and quizzes 60%; exam 60% (bonus possibility). The student must achieve at least 40% of maximum points both in exam and in exercises

Workload (valid 01.08.2018-31.07.2020): 

1 hour of lectures/week = 12 h
2 hours of exercises/week = 24 h
Homework for weekly exercises = 75 h
Preparation for exam = 20 h
Exam = 4 h

Study Material (valid 01.08.2018-31.07.2020): 

Sami Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010. Available electronically via Aalto library. (1st edition can be used).

Substitutes for Courses (valid 01.08.2018-31.07.2020): 

S-69.3103 Semiconductor technology II (5 cr), MT-0.6031 Microsystems (3 cr), MT-0.6061 Microfabrication (5 cr).

Course Homepage (valid 01.08.2018-31.07.2020): 

https://mycourses.aalto.fi/course/search.php?search=CHEM-E5115

Prerequisites (valid 01.08.2018-31.07.2020): 

Useful previous studies:

Bachelors-level physics, chemistry, materials science, electronics.

Important concepts: crystal structure, unit cell, defects, doping, diffusion, Arrhenius, diffraction. Semiconductor technology a plus.

Grading Scale (valid 01.08.2018-31.07.2020): 

0-5.

60% based on exercises and quizzes; 60% on exam (bonus possibility).

Registration for Courses (valid 01.08.2018-31.07.2020): 

WebOodi

The course is primarily intended for students majoring in the following subjects:

Functional materials

Advanced materials and photonics

Micro- and nanosciences

Biosensing and bioelectronics

If more than 40 students enrol, students in abovementioned majors have priority.

Further Information (valid 01.08.2018-31.07.2020): 

The course is primarily intended for students majoring in the following subjects:
Functional materials
Advanced materials and photonics
Micro- and nanosciences
Biosensing and -electronics

If more than 40 students enrol, students in abovementioned majors have priority.

Description

Registration and further information