Please note! Course description is confirmed for two academic years, which means that in general, e.g. Learning outcomes, assessment methods and key content stays unchanged. However, via course syllabus, it is possible to specify or change the course execution in each realization of the course, such as how the contact sessions are organized, assessment methods weighted or materials used.


The student is able to design fabrication processes for simple silicon microdevices, and able to analyze fabrication processes of complex silicon microdevices.

Credits: 5

Schedule: 02.03.2021 - 04.06.2021

Teacher in charge (valid 01.08.2020-31.07.2022): Sami Franssila, Sami Franssila

Teacher in charge (applies in this implementation): Sami Franssila, Sami Franssila

Contact information for the course (valid 02.02.2021-21.12.2112):


responsible teacher:

CEFR level (applies in this implementation):

Language of instruction and studies (valid 01.08.2020-31.07.2022):

Teaching language: English

Languages of study attainment: English


  • Valid 01.08.2020-31.07.2022:

    Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS and MEMS devices. Cleanrooms, process equipment, yield and reliability. Lab demo.

Assessment Methods and Criteria
  • Valid 01.08.2020-31.07.2022:

    Exercises and quizzes 60%; exam 60% (bonus possibility). The student must achieve at least 40% of maximum points both in exam and in exercises.

  • Valid 01.08.2020-31.07.2022:

    3 hours of contact teaching/week (lectures, on-the-spot exercises, home exercise review sessions)

    Laboratory demo


  • Applies in this implementation:

    3 hours/week contact teaching

    8 hours/week individual work (weekly homework, lab demo report, exam preparation, reading textbook)


Study Material
  • Valid 01.08.2020-31.07.2022:

    Selected chapters from Sami Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010. Available electronically via Aalto library. (1st edition can be used).

  • Valid 01.08.2020-31.07.2022:

    Bachelors-level physics, chemistry, materials science, electronics.

    Important concepts: crystal structure, unit cell, defects, doping, diffusion, Arrhenius, diffraction. Semiconductor technology a plus.

SDG: Sustainable Development Goals

    7 Affordable and Clean Energy

    8 Decent Work and Economic Growth

    9 Industry, Innovation and Infrastructure