CHEM-E5115 - Microfabrication D, Lecture, 1.3.2022-3.6.2022

Please note! Course description is confirmed for two academic years, which means that in general, e.g. Learning outcomes, assessment methods and key content stays unchanged. However, via course syllabus, it is possible to specify or change the course execution in each realization of the course, such as how the contact sessions are organized, assessment methods weighted or materials used.

LEARNING OUTCOMES

The student is able to design fabrication processes for simple silicon microdevices, and able to analyze fabrication processes of complex silicon microdevices.

Credits: 5

Schedule: 01.03.2022 - 03.06.2022

Teacher in charge (valid for whole curriculum period):

Teacher in charge (applies in this implementation): Sami Franssila

Contact information for the course (applies in this implementation):

CEFR level (valid for whole curriculum period):

Language of instruction and studies (applies in this implementation):

Teaching language: English. Languages of study attainment: English

CONTENT, ASSESSMENT AND WORKLOAD

Content

  • valid for whole curriculum period:

    Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS and MEMS devices. Cleanrooms, process equipment, yield and reliability. Lab demo.

Assessment Methods and Criteria

  • valid for whole curriculum period:

    Exercises and quizzes 60%; exam 60% (bonus possibility). The student must achieve at least 40% of maximum points both in exam and in exercises.

Workload

  • valid for whole curriculum period:

    3 hours of contact teaching/week (lectures, on-the-spot exercises, home exercise review sessions)

    Laboratory demo

     

DETAILS

Study Material

  • valid for whole curriculum period:

    Selected chapters from Sami Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010. Available electronically via Aalto library. (1st edition can be used).

Substitutes for Courses
Prerequisites
SDG: Sustainable Development Goals

    7 Affordable and Clean Energy

    8 Decent Work and Economic Growth

    9 Industry, Innovation and Infrastructure

FURTHER INFORMATION

Further Information

  • valid for whole curriculum period:

    The course is primarily intended for students majoring in the following subjects:
    Functional materials
    Advanced materials and photonics
    Micro- and nanosciences
    Biosensing and -electronics

    If more than 40 students enrol, students in abovementioned majors have priority.

    Teaching Period:

    2020-2021 Spring IV-V

    2021-2022 Spring IV-V

    Course Homepage: https://mycourses.aalto.fi/course/search.php?search=CHEM-E5115

    Registration for Courses: In the academic year 2021-2022, registration for courses will take place on Sisu (sisu.aalto.fi) instead of WebOodi.

    Sisu

    The course is primarily intended for students majoring in the following subjects:

    Functional materials

    Advanced materials and photonics

    Micro- and nanosciences

    Biosensing and bioelectronics

    If more than 40 students enrol, students in abovementioned majors have priority.

Rules of Conduct - Students´ Rights and Responsibilities (in force from 1 August 2020)

Aalto University Code of Academic Integrity and Handling Violations Thereof