CHEM-E5115 - Microfabrication D, Lecture, 28.2.2023-2.6.2023

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Please note! Course description is confirmed for two academic years, which means that in general, e.g. Learning outcomes, assessment methods and key content stays unchanged. However, via course syllabus, it is possible to specify or change the course execution in each realization of the course, such as how the contact sessions are organized, assessment methods weighted or materials used.

LEARNING OUTCOMES

The student is able to design fabrication processes for simple silicon microdevices, and able to analyze fabrication processes of complex silicon microdevices.

Credits: 5

Schedule: 28.02.2023 - 02.06.2023

Teacher in charge (valid for whole curriculum period):

Teacher in charge (applies in this implementation): Sami Franssila

Contact information for the course (applies in this implementation):

CEFR level (valid for whole curriculum period):

Language of instruction and studies (applies in this implementation):

Teaching language: English. Languages of study attainment: English

CONTENT, ASSESSMENT AND WORKLOAD

Content

  • valid for whole curriculum period:

    Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS and MEMS devices. Cleanrooms, process equipment, yield and reliability. Lab demo.

Assessment Methods and Criteria

  • valid for whole curriculum period:

    Exercises and quizzes 60%; exam 60% (bonus possibility). The student must achieve at least 40% of maximum points both in exam and in exercises.

Workload

  • valid for whole curriculum period:

    3 hours of contact teaching/week (lectures, on-the-spot exercises, home exercise review sessions)

    Laboratory demo

     

DETAILS

Substitutes for Courses
Prerequisites

FURTHER INFORMATION

Further Information

  • valid for whole curriculum period:

    Teaching Language : English

    Teaching Period : 2022-2023 Spring IV - V
    2023-2024 Spring IV - V

    Enrollment :

    Registration for Courses: registration for courses will take place on Sisu (sisu.aalto.fi). The course is primarily intended for students majoring in the following subjects: Functional materials, Advanced materials and photonics, Micro- and nanosciences, Biosensing and bioelectronics If more than 40 students enrol, students in abovementioned majors have priority.

    A course implementation may be cancelled if the number of students enrolled to the course implementation does not meet the required minimum of five students. In the case of cancelled course implementations, the students enrolled to them must be provided with an alternative way of completing the course or be advised to take some other applicable course.

Rules of Conduct - Students´ Rights and Responsibilities (in force from 1 August 2020)

Aalto University Code of Academic Integrity and Handling Violations Thereof