LEARNING OUTCOMES
After having passed this course the student knows the basic thin film processing methods by using vacuum technology, the basic thin films structure and property characterization methods. The student is familiar with the dependence of thin films structure and properties to the critical coating parameters. The student can select the most potential methods to produce thin films for wanted applications.
Credits: 5
Schedule: 09.01.2024 - 23.02.2024
Teacher in charge (valid for whole curriculum period):
Teacher in charge (applies in this implementation): Jari Koskinen, Ville Miikkulainen, Sami Franssila
Contact information for the course (applies in this implementation):
CEFR level (valid for whole curriculum period):
Language of instruction and studies (applies in this implementation):
Teaching language: English. Languages of study attainment: English
CONTENT, ASSESSMENT AND WORKLOAD
Content
valid for whole curriculum period:
Principles of vacuum technology, surface physics and surface-ion interactions and low pressure plasma. Thin film methods: Physical vapor deposition, chemical vapor deposition, and other plasma. Characterization methods for thin films to determine, structure, composition, and mechanical and optical properties.
Assessment Methods and Criteria
valid for whole curriculum period:
Lectures, active exercises and student presentations during contact sessions, examination.
Workload
valid for whole curriculum period:
5 cr
Contact teaching
Self-study for exercises
Preparation of exam
DETAILS
Substitutes for Courses
valid for whole curriculum period:
Prerequisites
valid for whole curriculum period:
SDG: Sustainable Development Goals
6 Clean Water and Sanitation
7 Affordable and Clean Energy
8 Decent Work and Economic Growth
9 Industry, Innovation and Infrastructure
FURTHER INFORMATION
Further Information
valid for whole curriculum period:
Teaching Language : English
Teaching Period : 2022-2023 Spring III
2023-2024 Spring IIIEnrollment :
Students chosen to this course are primarily major students of Functional Materials. If more than 20 students enroll to this course, the number of course participants can be limited. All major students are, however, chosen to the course if enrolled in time.
A course implementation may be cancelled if the number of students enrolled to the course implementation does not meet the required minimum of five students. In the case of cancelled course implementations, the students enrolled to them must be provided with an alternative way of completing the course or be advised to take some other applicable course.