LEARNING OUTCOMES
The student is able to design fabrication processes for simple silicon microdevices, and able to analyze fabrication processes of complex silicon microdevices.
Credits: 5
Schedule: 27.02.2024 - 31.05.2024
Teacher in charge (valid for whole curriculum period):
Teacher in charge (applies in this implementation): Sami Franssila
Contact information for the course (applies in this implementation):
CEFR level (valid for whole curriculum period):
Language of instruction and studies (applies in this implementation):
Teaching language: English. Languages of study attainment: English
CONTENT, ASSESSMENT AND WORKLOAD
Content
valid for whole curriculum period:
Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS and MEMS devices. Cleanrooms, process equipment, yield and reliability. Lab demo.
Assessment Methods and Criteria
valid for whole curriculum period:
Exercises and quizzes 60%; exam 60% (bonus possibility). The student must achieve at least 40% of maximum points both in exam and in exercises.
Workload
valid for whole curriculum period:
3 hours of contact teaching/week (lectures, on-the-spot exercises, home exercise review sessions)
Laboratory demo
DETAILS
Study Material
valid for whole curriculum period:
Selected chapters from Sami Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010. Available electronically via Aalto library. (1st edition can be used).
Substitutes for Courses
valid for whole curriculum period:
Prerequisites
valid for whole curriculum period:
FURTHER INFORMATION
Further Information
valid for whole curriculum period:
Teaching Language : English
Teaching Period : 2022-2023 Spring IV - V
2023-2024 Spring IV - VEnrollment :
Registration for Courses: registration for courses will take place on Sisu (sisu.aalto.fi). The course is primarily intended for students majoring in the following subjects: Functional materials, Advanced materials and photonics, Micro- and nanosciences, Biosensing and bioelectronics If more than 40 students enrol, students in abovementioned majors have priority.
A course implementation may be cancelled if the number of students enrolled to the course implementation does not meet the required minimum of five students. In the case of cancelled course implementations, the students enrolled to them must be provided with an alternative way of completing the course or be advised to take some other applicable course.