LEARNING OUTCOMES
The student is able to design fabrication processes for simple silicon microdevices, and able to analyze fabrication processes of complex silicon microdevices.
Credits: 5
Schedule: 25.02.2025 - 30.05.2025
Teacher in charge (valid for whole curriculum period):
Teacher in charge (applies in this implementation): Sami Franssila
Contact information for the course (applies in this implementation):
CEFR level (valid for whole curriculum period):
Language of instruction and studies (applies in this implementation):
Teaching language: English. Languages of study attainment: English
CONTENT, ASSESSMENT AND WORKLOAD
Content
valid for whole curriculum period:
Silicon and thin film materials. Unit processes in microfabrication: lithography, etching, deposition, oxidation, doping, polishing, bonding. Process integration of CMOS, MEMS and nanodevices. Cleanrooms, process equipment, yield and reliability. Lab demo.
Assessment Methods and Criteria
valid for whole curriculum period:
Exercises and quizzes 60%; exam 60% (bonus possibility). The student must achieve at least 40% of maximum points both in exam and in exercises.
Workload
valid for whole curriculum period:
3 hours of contact teaching/week (lectures, on-the-spot exercises, home exercise review sessions)
Laboratory demo
DETAILS
Study Material
valid for whole curriculum period:
Selected chapters from Sami Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010. Available electronically via Aalto library. (1st edition can be used).
Substitutes for Courses
valid for whole curriculum period:
Prerequisites
valid for whole curriculum period:
FURTHER INFORMATION
Further Information
valid for whole curriculum period:
Teaching Language: English
Teaching Period: 2024-2025 Spring IV - V
2025-2026 Spring IV - V