LEARNING OUTCOMES
This course is about micro-electro-mechanical systems (MEMS), which are miniaturized devices in the micrometer scale combining mechanical (moving), optical, and fluidic elements with electronics. The course covers the main physical operation principals and applications of MEMS technology enabling today numerous functions in e.g. smart phones such as motion sensing, image stabilization, voice recognition, environmental monitoring and proximity sensing.
After the course the student will understand the operating principals of advanced MEMS, be able to design extremely miniaturized sensors and actuators and conduct quantitative performance analysis. The student will be familiar with the tools to characterize MEMS devices and identify and analyse key impact factors from manufacturing and design. The student will also gain insight into future sensor and actuator development needs on accuracy, security, new materials and integration for high performance applications such as autonomous driving, fifth generation (5G) mobile communication systems, internet of things (IoT), augmented reality (AR) and virtual reality (VR).
Credits: 5
Schedule: 02.09.2024 - 13.12.2024
Teacher in charge (valid for whole curriculum period):
Teacher in charge (applies in this implementation): Mervi Paulasto-Kröckel, Nikhilendu Tiwary
Contact information for the course (applies in this implementation):
CEFR level (valid for whole curriculum period):
Language of instruction and studies (applies in this implementation):
Teaching language: English. Languages of study attainment: English
CONTENT, ASSESSMENT AND WORKLOAD
Content
valid for whole curriculum period:
Micro-electro-mechanical systems such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling.
Assessment Methods and Criteria
valid for whole curriculum period:
Exam, homework, assignments
Workload
valid for whole curriculum period:
Lectures and exercises
Homework and other independent work
DETAILS
Study Material
valid for whole curriculum period:
Lecture notes, other material provided by the lecturers
Recommended reference material:
• Handbook of Silicon Based MEMS Materials and Technologies, 3rd Edition, 2020, ISBN: 9780128177877
• Practical MEMS, Ville Kaajakari, 2009
Substitutes for Courses
valid for whole curriculum period:
Prerequisites
valid for whole curriculum period:
SDG: Sustainable Development Goals
3 Good Health and Well-being
9 Industry, Innovation and Infrastructure
11 Sustainable Cities and Communities
FURTHER INFORMATION
Further Information
valid for whole curriculum period:
Teaching Language: English
Teaching Period: 2024-2025 Autumn I - II
2025-2026 Autumn I - II