Please note! Course description is confirmed for two academic years (1.8.2018-31.7.2020), which means that in general, e.g. Learning outcomes, assessment methods and key content stays unchanged. However, via course syllabus, it is possible to specify or change the course execution in each realization of the course, such as how the contact sessions are organized, assessment methods weighted or materials used.


This course is about micro-electro-mechanical systems (MEMS), which are miniaturized devices in the micrometer scale combining mechanical (moving), optical, and fluidic elements with electronics. The course covers the main physical operation principals and applications of MEMS technology enabling today numerous functions in e.g. smart phones such as motion sensing, image stabilization, voice recognition, environmental monitoring and proximity sensing.
After the course the student will understand the operating principals of advanced MEMS, be able to design extremely miniaturized sensors and actuators and conduct quantitative performance analysis. The student will be familiar with the tools to characterize MEMS devices and identify and analyse key impact factors from manufacturing and design. The student will also gain insight into future sensor and actuator development needs on accuracy, security, new materials and integration for high performance applications such as autonomous driving, fifth generation (5G) mobile communication systems, internet of things (IoT), augmented reality (AR) and virtual reality (VR).

Credits: 5

Schedule: 07.09.2020 - 07.12.2020

Teacher in charge (valid 01.08.2020-31.07.2022): Mervi Paulasto-Kröckel

Teacher in charge (applies in this implementation): Mervi Paulasto-Kröckel

Contact information for the course (applies in this implementation):

CEFR level (applies in this implementation):

Language of instruction and studies (valid 01.08.2020-31.07.2022):

Teaching language: English

Languages of study attainment: English


  • Valid 01.08.2020-31.07.2022:

    Micro-electro-mechanical systems such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling.

Assessment Methods and Criteria
  • Valid 01.08.2020-31.07.2022:

    Exam and assignments/excersices

  • Valid 01.08.2020-31.07.2022:

    Lectures and exercises: 60 h
    Homework and other independent work: 70 h


  • Valid 01.08.2020-31.07.2022:


SDG: Sustainable Development Goals

    9 Industry, Innovation and Infrastructure



Registration and further information