LEARNING OUTCOMES
After having passed this course the student knows the basic thin film processing methods by using vacuum technology, the basic thin films structure and property characterization methods. The student is familiar with the dependence of thin films structure and properties to the critical coating parameters. The student can select the most potential methods to produce thin films for wanted applications.
Credits: 5
Schedule: 11.01.2022 - 25.02.2022
Teacher in charge (valid for whole curriculum period):
Teacher in charge (applies in this implementation): Jari Koskinen
Contact information for the course (applies in this implementation):
CEFR level (valid for whole curriculum period):
Language of instruction and studies (applies in this implementation):
Teaching language: English. Languages of study attainment: English
CONTENT, ASSESSMENT AND WORKLOAD
Content
valid for whole curriculum period:
Principles of vacuum technology, surface physics and surface-ion interactions and low pressure plasma. Thin film methods: Physical vapor deposition, chemical vapor deposition, and other plasma. Characterization methods for thin films to determine, structure, composition, and mechanical and optical properties.
Assessment Methods and Criteria
valid for whole curriculum period:
Lectures, active exercises and student presentations during contact sessions, examination.
Workload
valid for whole curriculum period:
5 cr
Contact teaching
Self-study for exercises
Preparation of exam
DETAILS
Study Material
valid for whole curriculum period:
Handouts, training material. Murarka, S.P.: Metallization, Theory and Practice for VLSI and ULSI, Butterworth-Heinemann, 1993. Mahan, J.E.: Physical Vapor Deposition of Thin Films, John Wiley & Sons, 2000. Smith, D.L.: Thin-film deposition: principles and practice, McGraw-Hill, 1995. J.L. Vossen & W. Kern (eds.): Thin Film Processes II, Academic Press, 1991. Ohring, M.: The Materials Science of Thin Films, Academic Press, 1992.
Substitutes for Courses
valid for whole curriculum period:
Prerequisites
valid for whole curriculum period:
SDG: Sustainable Development Goals
3 Good Health and Well-being
7 Affordable and Clean Energy
9 Industry, Innovation and Infrastructure
11 Sustainable Cities and Communities
13 Climate Action
FURTHER INFORMATION
Further Information
valid for whole curriculum period:
Students chosen to this course are primarily major students of Functional Materials. If more than 20 students enroll to this course, the number of course participants can be limited. All major students are, however, chosen to the course if enrolled in time.
Teaching Period:
2020-2021 Spring III
2021-2022 Spring III
Course Homepage: https://mycourses.aalto.fi/course/search.php?search=CHEM-E5125
Registration for Courses: In the academic year 2021-2022, registration for courses will take place on Sisu (sisu.aalto.fi) instead of WebOodi.
Sisu
Students chosen to this course are primarily major students of Functional Materials. If more than 20 students enroll to this course, the number of course participants can be limited. All major students are, however, chosen to the course if enrolled in time.