ELEC-E8715 - Design and Analysis of MEMS D, Lecture, 5.9.2022-5.12.2022
This course space end date is set to 05.12.2022 Search Courses: ELEC-E8715
Topic outline
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About the course: This course covers micro-electro-mechanical systems (MEMS) such as inertial sensors, piezoactuated ultrasonic transducers and resonating sensors, optical mirrors, fabry-perot interferometers and microfluidic systems. Physical operating principals, design of actuators and sensors and their characterization. Impact of manufacturing on performance and accuracy. Mechanics of thin film materials and membranes, residual stresses in multimaterial structures, principles of finite element modelling using Comsol.
Teachers: Experts from Aalto University, VTT, Murata Electronics and Vaisala
Structure: Onsite lectures in R030/T6 A136, exercises
Requirements and grading:
- Grading from 0 to 5
- Exam 40% (max 120 points)
- Exercises 60% (max 180 points)
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Course Grades Folder
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