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CHEM-E5115 - Microfabrication, 26.02.2019-15.05.2019
This course space end date is set to 15.05.2019
Search Courses: CHEM-E5115
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Select activity General info
General info
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Select activity Updated schedule
Updated schedule
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Select activity Lecture and exercise schedule
Lecture and exercise schedule
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Select activity Lecture 1: Introduction
Lecture 1: Introduction
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PPT
Select activity Lecture 2: lithography and etching
Lecture 2: lithography and etching
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PPT
Select activity Lecture 3: silicon
Lecture 3: silicon
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Select activity Lecture 4: thin films
Lecture 4: thin films
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Select activity Lecture 5: cleaning and cleanroom
Lecture 5: cleaning and cleanroom
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Select activity Spot exercise 1 solutions
Spot exercise 1 solutions
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Select activity Lecture 6: oxidation
Lecture 6: oxidation
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Select activity Lecture 7: lab demo process flow
Lecture 7: lab demo process flow
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Select activity Lecture 8: doping and epitaxy
Lecture 8: doping and epitaxy
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Select activity Lecture 9: bonding and CMP
Lecture 9: bonding and CMP
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Select activity Lecture 10: integration
Lecture 10: integration
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Select activity Lecture 11: CMOS
Lecture 11: CMOS
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Select activity Lectuer 12: MEMS 1
Lectuer 12: MEMS 1
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Select activity Lecture 13 Surface MEMS
Lecture 13 Surface MEMS
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Select activity Lecture 14: Bulk and SOI MEMS
Lecture 14: Bulk and SOI MEMS
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Select activity Lecture 15: yeild and economics
Lecture 15: yeild and economics
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Select activity Lecture 16: Scaling
Lecture 16: Scaling
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Select activity Lecture 17: nano-CMOS and Moore
Lecture 17: nano-CMOS and Moore
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Select activity Old exam for you to see
Old exam for you to see
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Select activity Old exam too
Old exam too
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