CHEM-E5115 - Microfabrication D, Lecture, 28.2.2023-2.6.2023

Topic outline

• Lecture slides
  • Select activity L1 intro

    

    L1 intro File PDF
  • Select activity L2 lithography and etching

    

    L2 lithography and etching File PDF
  • Select activity L3 Silicon

    

    L3 Silicon File PDF
  • Select activity L4 Cleanroom and safety. Cleaning

    

    L4 Cleanroom and safety. Cleaning File PDF
  • Select activity L5 Thin films

    

    L5 Thin films File PDF
  • Select activity L6 oxidation

    

    L6 oxidation File PDF
  • Select activity L8 Doping. Epitaxy

    

    L8 Doping. Epitaxy File PDF
  • Select activity L9 Bonding. CMP

    

    L9 Bonding. CMP File PDF
  • Select activity L10 Process integration

    

    L10 Process integration File PDF
  • Select activity L11 Etching for MEMS

    

    L11 Etching for MEMS File PDF
  • Select activity L12 CMOS

    

    L12 CMOS File PDF
  • Select activity L13 MEMS in bulk and SOI wafers

    

    L13 MEMS in bulk and SOI wafers File PDF
  • Select activity L14 surface MEMS

    

    L14 surface MEMS File PDF
  • Select activity L14 alternative with audio clips

    

    L14 alternative with audio clips File PPTX
  • Select activity L15 Yield. Reliability

    

    L15 Yield. Reliability File PDF
  • Select activity L16 Economics of microfabrication

    

    L16 Economics of microfabrication File PDF
  • Select activity L17 scaling

    

    L17 scaling File PDF
  • Select activity L18 Nano-CMOS and Moore law

    

    L18 Nano-CMOS and Moore law File PDF
  • Select activity L extra Quick guide

    

    L extra Quick guide File PDF
  • Select activity L5 lab device

    

    L5 lab device File PDF